Self-assembled 3D silicon microscanners with self-assembled electrostatic drives

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Title: Self-assembled 3D silicon microscanners with self-assembled electrostatic drives
Authors: Syms,R.R.A.
Item Type: Journal Article
Content Version: Published version
Issue Date: 1-Nov-2000
Citation: IEEE Photonics Technology Letters Vol.( 12 ) No.( 11 ) pp 1519 - 1521
URI: http://hdl.handle.net/10044/1/993
Publisher Link: http://dx.doi.org/10.1109/68.887729
ISSN: 1041-1135
Start Page: 1519
End Page: 1521
Copyright Statement: © 2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.
Volume: 12
Appears in Collections:Optical and Semiconductor Devices



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