Self-assembled 3D silicon microscanners with self-assembled electrostatic drives

Title:	Self-assembled 3D silicon microscanners with self-assembled electrostatic drives
Authors:	Syms,R.R.A.
Item Type:	Journal Article
Content Version:	Published version
Issue Date:	1-Nov-2000
Citation:	IEEE Photonics Technology Letters Vol.( 12 ) No.( 11 ) pp 1519 - 1521
URI:	http://hdl.handle.net/10044/1/993
Publisher Link:	http://dx.doi.org/10.1109/68.887729
ISSN:	1041-1135
Start Page:	1519
End Page:	1521
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Volume:	12
Appears in Collections:	Optical and Semiconductor Devices