Dynamic response modelling of MEMS micromirror corner cube reflectors with angular vertical combdrives

Title:	Dynamic response modelling of MEMS micromirror corner cube reflectors with angular vertical combdrives
Authors:	Hong, Y K Syms, R R A
Item Type:	Journal Article
Content Version:	Published version
Issue Date:	1-Feb-2007
Citation:	IEEE J. Lightwave Tech. Vol.( 25 ) No.( 2 ) pp 472 - 480
URI:	http://hdl.handle.net/10044/1/983
Publisher Link:	http://dx.doi.org/10.1109/JLT.2006.889137
ISSN:	0733-8724
Start Page:	472
End Page:	480
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Volume:	25
Appears in Collections:	Optical and Semiconductor Devices