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Excimer laser ablation of microstructures: A numerical model
File | Description | Size | Format | |
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Excimer laser ablation of.pdf | Published version | 739.54 kB | Adobe PDF | View/Open |
Title: | Excimer laser ablation of microstructures: A numerical model |
Authors: | Paterson, C Holmes, AS Smith, RW |
Item Type: | Journal Article |
Content Version: | Published version |
Issue Date: | 1-Dec-1999 |
Citation: | J APPL PHYS Vol.( 86 ) No.( 11 ) pp 6538 - 6546 |
URI: | http://hdl.handle.net/10044/1/698 |
Publisher Link: | http://dx.doi.org/10.1063/1.371816 |
ISSN: | 0021-8979 |
Start Page: | 6538 |
End Page: | 6546 |
Copyright Statement: | © American Institute of Physics |
Volume: | 86 |
Appears in Collections: | Optical and Semiconductor Devices Photonics |