MEMS electrostatic micropower generator for low frequency operation

Title:	MEMS electrostatic micropower generator for low frequency operation
Authors:	Mitcheson, PD Miao, P Stark, BH Yeatman, EM Holmes, AS Green, TC
Item Type:	Journal Article
Content Version:	Accepted version
Issue Date:	21-Sep-2004
Citation:	Sensors and Actuators A: Physical Vol.( Volume 115 ) No.( 2-3 ) pp 523 - 529
URI:	http://hdl.handle.net/10044/1/4221
Publisher Link:	http://dx.doi.org/10.1016/j.sna.2004.04.026
DOI:	10.1016/j.sna.2004.04.026
ISSN:	0924-4247
Start Page:	523
End Page:	529
Copyright Statement:	© 2004 Elsevier B.V. This is the author's version of a work that was accepted for publication in Sensors and Actuators A: Physical. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Sensors and Actuators A: Physical, volume 115, issue 2-3 (September 2004). doi:10.1016/j.sna.2004.04.026
Volume:	Volume 115
Appears in Collections:	Control and Power