Batch fabrication of micro-coils for MR spectroscopy on silicon

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Title: Batch fabrication of micro-coils for MR spectroscopy on silicon
Authors: Syms,R.R.A.
Item Type: Conference Paper
Content Version: Published version
Issue Date: 31-Dec-2005
Publisher Link:
ISBN: 0-7803-9056-3
Presented At: 4th IEEE International Conference on Sensors, 31 October - 1 November 2005, Irvine, CA
Start Page: 227
End Page: 230
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Appears in Collections:Optical and Semiconductor Devices

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