Batch fabrication of micro-coils for MR spectroscopy on silicon

Title:	Batch fabrication of micro-coils for MR spectroscopy on silicon
Authors:	Syms,R.R.A. Ahmad,M.M. Young,I.R. Gilderdale,D. Collins,D.J. Leach,M.O.
Item Type:	Conference Paper
Content Version:	Published version
Issue Date:	31-Dec-2005
URI:	http://hdl.handle.net/10044/1/1016
Publisher Link:	http://dx.doi.org/10.1109/ICSENS.2005.1597677
ISBN:	0-7803-9056-3
Presented At:	4th IEEE International Conference on Sensors, 31 October - 1 November 2005, Irvine, CA
Start Page:	227
End Page:	230
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Appears in Collections:	Optical and Semiconductor Devices