Monolithic MEMS quadrupole mass spectrometers by deep silicon etching

Title:	Monolithic MEMS quadrupole mass spectrometers by deep silicon etching
Authors:	Geear,M. Syms,R.R.A. Wright,S. Holmes,A.S.
Item Type:	Journal Article
Content Version:	Published version
Issue Date:	1-Oct-2005
Citation:	Journal of Microelectromechanical Systems Vol.( 14 ) No.( 5 ) pp 1156 - 1166
URI:	http://hdl.handle.net/10044/1/1010
Publisher Link:	http://dx.doi.org/10.1109/JMEMS.2005.851799
ISSN:	1057-7157
Start Page:	1156
End Page:	1166
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Volume:	14
Appears in Collections:	Optical and Semiconductor Devices