Monolithic MEMS quadrupole mass spectrometers by deep silicon etching

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Title: Monolithic MEMS quadrupole mass spectrometers by deep silicon etching
Authors: Geear,M.
Item Type: Journal Article
Content Version: Published version
Issue Date: 1-Oct-2005
Citation: Journal of Microelectromechanical Systems Vol.( 14 ) No.( 5 ) pp 1156 - 1166
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ISSN: 1057-7157
Start Page: 1156
End Page: 1166
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Volume: 14
Appears in Collections:Optical and Semiconductor Devices

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