Supersonic jet interactions with a micro-engineered skimmer
File(s)syms_wright_R1.pdf (2.88 MB)
Accepted version
Author(s)
Wright, S
Syms, RRA
Type
Journal Article
Abstract
A micro-engineered, skimmer-based vacuum interface has been demonstrated and used to investigate gas dynamics on a sub-millimeter length scale. The interface is fabricated as a stacked assembly of silicon dies, based on an anisotropically etched inlet orifice and a pyramidal skimmer cone formed in electroplated nickel. Expansion of gas into vacuum, interaction of a supersonic jet with the skimmer and transmission of a collimated beam into a second vacuum stage have all been imaged with a schlieren microscope. Using a glass-walled vacuum chamber, flow patterns upstream and fully downstream of the skimmer have been imaged together for the first time. At low first-stage pressures, the 150–200 µm tall skimmers cannot fully penetrate the shock arising from interaction of the jet with the back wall. However, as the pressure is increased, a multiple shock cell structure evolves, the jet narrows and transmission rises sharply. Eventually, a collimated beam is transmitted to the second stage. When the skimmer aperture is smaller than the source aperture, a series of distinct peaks is evident in a plot of transmission against first-stage pressure. Imaging shows that at each successive peak, the number of shock cells increases by one and the skimmer inlet is coincident with a node.
Date Issued
2018-08-01
Date Acceptance
2018-04-25
Citation
Journal of Micromechanics and Microengineering, 2018, 28 (8)
ISSN
0960-1317
Publisher
IOP Publishing
Journal / Book Title
Journal of Micromechanics and Microengineering
Volume
28
Issue
8
Copyright Statement
© 2018 IOP Publishing Ltd. This is an author-created, un-copyedited version of an article accepted for publication in [insert name of journal]. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The definitive publisher authenticated version is available online at http://iopscience.iop.org/volume/0960-1317/28
Identifier
http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000432351800001&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=1ba7043ffcc86c417c072aa74d649202
Subjects
Science & Technology
Technology
Physical Sciences
Engineering, Electrical & Electronic
Nanoscience & Nanotechnology
Instruments & Instrumentation
Physics, Applied
Engineering
Science & Technology - Other Topics
Physics
vacuum interface
skimmer
schlieren imaging
micro-jet
bulk micromachining
MASS-SPECTROMETER
SHOCK-WAVES
GAS-FLOW
MOLECULAR-BEAMS
PROFILE MONITOR
FLAT PLATES
SILICON
DYNAMICS
MICROPROPULSION
MICROTHRUSTER
Publication Status
Published
Article Number
ARTN 085017
Date Publish Online
2018-05-15