E-beam lithography and dry processing for submicron fabrication
Author(s)
Khaleque, Ferdouse
Type
Thesis
Version
Open Access
Date Issued
1990
Date Awarded
1990
Copyright Statement
Attribution NoDerivatives 4.0 International Licence (CC BY-ND)
Creator
Khaleque, Ferdouse
Publisher Department
Department of Electrical Engineering
Publisher Institution
Imperial College London
Qualification Level
Doctoral
Qualification Name
PhD