Dynamic response modelling of MEMS micromirror corner cube reflectors with angular vertical combdrives

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Title: Dynamic response modelling of MEMS micromirror corner cube reflectors with angular vertical combdrives
Author(s): Hong, Y K
Syms, R R A
Item Type: Journal Article
Content Version: Published version
Publication Date: 1-Feb-2007
Citation: IEEE J. Lightwave Tech. Vol.( 25 ) No.( 2 ) pp 472 - 480
URI: http://hdl.handle.net/10044/1/983
Publisher Link: http://dx.doi.org/10.1109/JLT.2006.889137
ISSN: 0733-8724
Start Page: 472
End Page: 480
Copyright Statement: © 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.
Volume: 25
Appears in Collections:Optical and Semiconductor Devices



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