Excimer laser ablation of microstructures: A numerical model

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Title: Excimer laser ablation of microstructures: A numerical model
Author(s): Paterson, C
Holmes, AS
Smith, RW
Item Type: Journal Article
Content Version: Published version
Publication Date: 1-Dec-1999
Citation: J APPL PHYS Vol.( 86 ) No.( 11 ) pp 6538 - 6546
URI: http://hdl.handle.net/10044/1/698
Publisher Link: http://dx.doi.org/10.1063/1.371816
ISSN: 0021-8979
Start Page: 6538
End Page: 6546
Copyright Statement: © American Institute of Physics
Volume: 86
Appears in Collections:Optical and Semiconductor Devices

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