A versatile direct laser writing lithography technique for surface enhanced infra-red spectroscopy sensors

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Title: A versatile direct laser writing lithography technique for surface enhanced infra-red spectroscopy sensors
Author(s): Braun, A
Maier, SA
Item Type: Journal Article
Abstract: A challenge for design, testing, and fabrication of nanostructured chemical sensors is the fabrication of mm2 size arrays of nanostructures in a reasonable time. Herein, we introduce and show how direct laser writing (DLW) in positive-tone photoresists, followed by lift-off process, can be used for fast fabrication (up to three times faster than a comparable electron beam lithography system) of arrays of nanoscale plasmonic structures with a great level of control over the design and dimensions of the nanostructures. We demonstrate the function of nanostructured arrays, fabricated by various DLW approaches, with surface enhanced infrared absorption (SEIRA) detection of nine vibrational modes of PMMA. We also discuss the tunability of the plasmonic resonance—and hence the spectral detection range—by alteration of the size and array parameters of the nanostructures, and demonstrate the flexibility of this fabrication method by showing devices made of various substrate and antenna materials.
Publication Date: 9-Aug-2016
Date of Acceptance: 9-Aug-2016
URI: http://hdl.handle.net/10044/1/39086
DOI: https://dx.doi.org/10.1021/acssensors.6b00469
ISSN: 2379-3694
Publisher: American Chemical Society
Start Page: 1155
End Page: 1162
Journal / Book Title: ACS Sensors
Volume: 1
Issue: 9
Copyright Statement: © 2016 American Chemical Society. This document is the Accepted Manuscript version of a Published Work that appeared in final form in ACS Sensors, after peer review and technical editing by the publisher. To access the final edited and published work see http://dx.doi.org/10.1021/acssensors.6b00469.
Sponsor/Funder: The Royal Society
Engineering & Physical Science Research Council (E
Funder's Grant Number: WM110079
EP/M013812/1
Keywords: Science & Technology
Physical Sciences
Chemistry, Multidisciplinary
Nanoscience & Nanotechnology
Chemistry
Science & Technology - Other Topics
chemical detection
SEIRA
plasmonic sensors
direct laser writing
nanofabrication
HIGH-THROUGHPUT NANOFABRICATION
NANOANTENNA ARRAYS
INTERFERENCE LITHOGRAPHY
ABSORPTION SEIRA
METAMATERIALS
FABRICATION
PLASMONICS
Publication Status: Published
Appears in Collections:Physics
Experimental Solid State
Faculty of Natural Sciences



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