Microfabricated Quadrupole Mass Spectrometer With a Brubaker Prefilter

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Title: Microfabricated Quadrupole Mass Spectrometer With a Brubaker Prefilter
Authors: Wright, S
O'Prey, S
Syms, RRA
Hong, G
Holmes, AS
Item Type: Journal Article
Issue Date: 1-Apr-2010
URI: http://hdl.handle.net/10044/1/15297
DOI: http://dx.doi.org/10.1109/JMEMS.2010.2040243
ISSN: 1057-7157
Publisher: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Start Page: 325
End Page: 337
Journal / Book Title: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume: 19
Issue: 2
Copyright Statement: © 2010 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Publication Status: Published
Appears in Collections:Electrical and Electronic Engineering



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