Sacrificial layer process with laser-driven release for batch assembly operations

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Title: Sacrificial layer process with laser-driven release for batch assembly operations
Authors: Holmes, AS
Saidam, SM
Item Type: Journal Article
Content Version: Published version
Issue Date: 1-Dec-1998
Citation: J MICROELECTROMECH S Vol.( 7 ) No.( 4 ) pp 416 - 422
URI: http://hdl.handle.net/10044/1/703
Publisher Link: http://dx.doi.org/10.1109/84.735350
ISSN: 1057-7157
Start Page: 416
End Page: 422
Copyright Statement: © 1998 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.
Volume: 7
Appears in Collections:Optical and Semiconductor Devices



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