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Sacrificial layer process with laser-driven release for batch assembly operations

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Title: Sacrificial layer process with laser-driven release for batch assembly operations
Authors: Holmes, AS
Saidam, SM
Item Type: Journal Article
Content Version: Published version
Issue Date: 1-Dec-1998
Citation: J MICROELECTROMECH S Vol.( 7 ) No.( 4 ) pp 416 - 422
URI: http://hdl.handle.net/10044/1/703
Publisher Link: http://dx.doi.org/10.1109/84.735350
ISSN: 1057-7157
Start Page: 416
End Page: 422
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Volume: 7
Appears in Collections:Optical and Semiconductor Devices