Sacrificial layer process with laser-driven release for batch assembly operations

Title:	Sacrificial layer process with laser-driven release for batch assembly operations
Authors:	Holmes, AS Saidam, SM
Item Type:	Journal Article
Content Version:	Published version
Issue Date:	1-Dec-1998
Citation:	J MICROELECTROMECH S Vol.( 7 ) No.( 4 ) pp 416 - 422
URI:	http://hdl.handle.net/10044/1/703
Publisher Link:	http://dx.doi.org/10.1109/84.735350
ISSN:	1057-7157
Start Page:	416
End Page:	422
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Volume:	7
Appears in Collections:	Optical and Semiconductor Devices