A 32 x 32 ISFET Chemical Sensing Array With Integrated Trapped Charge and Gain Compensation

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Title: A 32 x 32 ISFET Chemical Sensing Array With Integrated Trapped Charge and Gain Compensation
Authors: Hu, Y
Moser, N
Georgiou, P
Item Type: Journal Article
Abstract: This paper presents a CMOS-based 32 × 32 ion-sensitive field-effect transistor (ISFET) system-on-chip for real-time ion imaging. Fabricated in an unmodified 0.35-μm CMOS technology, the ISFET sensor array is based on a pixel topology, which uses capacitive feedback to improve signal attenuation due to passivation capacitance and a low-leakage floatinggate reset followed by a digital correlated double sampling to robustly remove unwanted trapped charge-induced dc offset. An automatic gain calibration (AGC) is used to perform realtime calibration and guarantee all sensors that have the same gain with a 99% accuracy, and combining all these mechanisms guarantees an average pixel voltage variation of 14.3 mV after gain is applied when measured over multiple dies. The full array is experimentally shown to be capable of real-time ion imaging of pH, with an intrinsic sensitivity of 39.6mV/pH and a scan rate of 9.3 frames/s when running the AGC, with a total power consumption of 10.2 mW.
Issue Date: 30-Jun-2017
Date of Acceptance: 17-Jun-2017
URI: http://hdl.handle.net/10044/1/53200
DOI: https://dx.doi.org/10.1109/JSEN.2017.2722043
ISSN: 1530-437X
Start Page: 5276
End Page: 5284
Journal / Book Title: IEEE SENSORS JOURNAL
Volume: 17
Issue: 16
Copyright Statement: © 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Keywords: Science & Technology
Physical Sciences
Engineering, Electrical & Electronic
Instruments & Instrumentation
Physics, Applied
CMOS sensor
sensor array
offset cancellation
automatic gain calibration
pH sensor
0906 Electrical And Electronic Engineering
0913 Mechanical Engineering
Analytical Chemistry
Publication Status: Published
Appears in Collections:Faculty of Engineering
Electrical and Electronic Engineering

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