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E-beam lithography and dry processing for submicron fabrication

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Khaleque-F-1990-PhD-Thesis.pdf18.88 MBAdobe PDFView/Open
Title: E-beam lithography and dry processing for submicron fabrication
Authors: Khaleque, Ferdouse
Item Type: Thesis or dissertation
Content Version: Imperial Users only
Issue Date: 1990
Date Awarded: 1990
URI: http://hdl.handle.net/10044/1/46389
Author: Khaleque, Ferdouse
Department: Department of Electrical Engineering
Publisher: Imperial College London
Qualification Level: Doctoral
Qualification Name: PhD
Appears in Collections:University of London awarded theses - Imperial authors



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