Parylene C-Based Flexible Electronics for pH Monitoring Applications
File(s)
Author(s)
Trantidou, T
Tariq, M
Terracciano, CM
Toumazou, C
Prodromakis, T
Type
Journal Article
Abstract
Emerging materials in the field of implantable sensors should meet the needs for biocompatibility; transparency; flexibility and integrability. In this work; we present an integrated approach for implementing flexible bio-sensors based on thin Parylene C films that serve both as flexible support substrates and as active H+ sensing membranes within the same platform. Using standard micro-fabrication techniques; a miniaturized 40-electrode array was implemented on a 5 μm-thick Parylene C film. A thin capping film (1 μm) of Parylene on top of the array was plasma oxidized and served as the pH sensing membrane. The sensor was evaluated with the use of extended gate discrete MOSFETs to separate the chemistry from the electronics and prolong the lifetime of the sensor. The chemical sensing array spatially maps the local pH levels; providing a reliable and rapid-response (<5 s) system with a sensitivity of 23 mV/pH. Moreover; it preserves excellent encapsulation integrity and low chemical drifts (0.26–0.38 mV/min). The proposed approach is able to deliver hybrid flexible sensing platforms that will facilitate concurrent electrical and chemical recordings; with application in real-time physiological recordings of organs and tissues.
Date Issued
2014-07-01
Date Acceptance
2014-06-27
Citation
Sensors, 2014, 14 (7), pp.11629-11639
ISSN
1424-8239
Start Page
11629
End Page
11639
Journal / Book Title
Sensors
Volume
14
Issue
7
Copyright Statement
© 2014 the Authors. Published under a Creative Commons CC BY licence
License URL
Subjects
Science & Technology
Physical Sciences
Technology
Chemistry, Analytical
Electrochemistry
Instruments & Instrumentation
Chemistry
CHEMISTRY, ANALYTICAL
ELECTROCHEMISTRY
INSTRUMENTS & INSTRUMENTATION
Parylene C
flexible electronics
pH sensor
extended gate
discrete MOSFETs
CHEMICAL-MODIFICATION
FILMS
ARRAY
SKIN
GATE
Publication Status
Published