MEMS AlN piezoelectric beams with integrated NdFeB magnets for power line and rotational motion energy harvesting
File(s)23_PowerMEMS_Final_Author_version.pdf (462.48 KB)
Accepted version
Author(s)
Type
Conference Paper
Abstract
On-chip power autonomy is a central objective of energy harvesting technologies. The integration of piezoelectric and magnetic materials with silicon-processing could address proof-mass size and broadband motion operation limitations. In this work, a MEMS device combining a silicon-based, AlN piezoelectric beam with an integrated NdFeB tip magnet is proposed as an energy harvesting transducer. The device is evaluated for rotational motion and power line energy harvesting use cases. In the rotational motion evaluation, a voltage output peak of 0.35 V is demonstrated from a permanent magnet passing at 4 mm distance. In the power line evaluation, an output power delivery of 5 μW on an ohmic load is demonstrated, at 10 mm distance from a power line carrying an RMS current of 13 A. These results show promising performance towards micro-chip integrated energy autonomy, suitable for time-varying magnetic field and relative structural motion environments.
Date Issued
2024-02-05
Date Acceptance
2023-12-01
Citation
2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS), 2024, pp.122-125
Publisher
IEEE
Start Page
122
End Page
125
Journal / Book Title
2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)
Copyright Statement
Copyright © 2024 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Source
22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)
Subjects
Energy & Fuels
energy autonomy
Energy harvesting
Engineering
Engineering, Electrical & Electronic
magnetic materials
MEMS
Nanoscience & Nanotechnology
piezoelectric
power line
rotation
Science & Technology
Science & Technology - Other Topics
Technology
Publication Status
Published
Start Date
2023-12-11
Finish Date
2023-12-14
Coverage Spatial
Abu Dhabi, United Arab