Microfabricated Quadrupole Mass Spectrometer With a Brubaker Prefilter

File(s)

Journal of Microelectromechanical Systems_19_2_2010.pdf (3.19 MB)

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Author(s)

Wright, S

O'Prey, S

Syms, RRA

Hong, G

Holmes, AS

Type

Journal Article

Date Issued

2010-04-01

URI

http://hdl.handle.net/10044/1/15297

DOI

http://dx.doi.org/10.1109/JMEMS.2010.2040243

ISSN

1057-7157

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

Start Page

325

End Page

337

Journal / Book Title

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Volume

19

Issue

2

Copyright Statement

© 2010 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

License URL

http://www.rioxx.net/licenses/all-rights-reserved

Identifier

http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=000276257700011&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=1ba7043ffcc86c417c072aa74d649202

Publication Status

Published