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Inorganic electron-beam resists for integrated circuits
File(s)
Author(s)
Fakolujo, Olasebikan Aladeo
Type
Thesis
Version
Open Access
Date Issued
1988
Date Awarded
1988
URI
Copyright Statement
Attribution NoDerivatives 4.0 International Licence (CC BY-ND)
License URL
Creator
Fakolujo, Olasebikan Aladeo
Publisher Department
Department of Electrical Engineering
Publisher Institution
Imperial College London
Qualification Level
Doctoral
Qualification Name
PhD