Impact of Zr top electrode on tantalum oxide-based electrochemical metallization resistive switching memory: towards synaptic functionalities
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Published version
Author(s)
Raeis-Hosseini, Niloufar
Chen, Shaochuan
Papavassiliou, Christos
Valov, Ilia
Type
Journal Article
Abstract
Electrochemical metallization memory (ECM) devices have been made by sub-stoichiometric deposition of a tantalum oxide switching film (Ta2O5−x) using sputtering. We investigated the influence of zirconium as the active top electrode material in the lithographically fabricated ECM devices. A simple capacitor like (Pt/Zr/Ta2O5−x/Pt) structure represented the resistive switching memory. A cyclic voltammetry measurement demonstrated the electrochemical process of the memory device. The I–V characteristics of ECMs show stable bipolar resistive switching properties with reliable endurance and retention. The resistive switching mechanism results from the formation and rupture of a conductive filament characteristic of ECM. Our results suggest that Zr can be considered a potential active electrode in the ECMs for the next generation of nonvolatile nanoelectronics. We successfully showed that the ECM device can work under AC pulses to emulate the essential characteristics of an artificial synapse by further improvements.
Date Issued
2022-05-11
Date Acceptance
2022-05-05
Citation
RSC Advances: an international journal to further the chemical sciences, 2022, 12 (22), pp.14235-14245
ISSN
2046-2069
Publisher
Royal Society of Chemistry
Start Page
14235
End Page
14245
Journal / Book Title
RSC Advances: an international journal to further the chemical sciences
Volume
12
Issue
22
Copyright Statement
© 2022 The Author(s). Published by the Royal Society of Chemistry. This article is licensed under a Creative Commons Attribution 3.0 Unported Licence.
License URL
Sponsor
The Royal Society
Identifier
https://pubs.rsc.org/en/content/articlelanding/2022/RA/D2RA02456J
Subjects
03 Chemical Sciences
Publication Status
Published
Date Publish Online
2022-05-11