Thin film growth and mechanical properties of CrFeCoNi/TiNbZrTa multilayers
File(s)
Published version
Author(s)
Type
Journal Article
Abstract
Multilayers of high entropy alloys (HEA) are picking up interest due to the possibility of altering material properties by tuning crystallinity, thickness, and interfaces of the layers. This study investigates the growth mechanism and mechanical properties of CrFeCoNi/TiNbZrTa multilayers grown by magnetron sputtering. Multilayers of bilayer thickness (Λ) from 5 nm to 50 nm were grown on Si(1 0 0) substrates. Images taken by transmission electron microscopy and energy-dispersive X-ray spectroscopy mapping revealed that the layers were well defined with no occurrence of elemental mixing. Multilayers with Λ < 20 nm exhibited an amorphous structure. As Λ increased, the CrFeCoNi layer displayed a higher crystallinity in comparison to the amorphous TiNbZrTa layer. The mechanical properties were influenced by the crystallinity of the layers and stresses in the film. The film with Λ = 20 nm had the highest hardness of approximately 12.5 GPa owing grain refinement of the CrFeCoNi layer. An increase of Λ ≥ 30 nm resulted in a drop in the hardness due to the increase in crystal domains of the CrFeCoNi layer. Micropillar compression induced shear in the material rather than fracture, along with elemental intermixing in the core of the deformed region of the compressed micropillar.
Date Issued
2022-12-01
Date Acceptance
2022-11-17
Citation
Materials & Design, 2022, 224
ISSN
0261-3069
Publisher
Elsevier
Journal / Book Title
Materials & Design
Volume
224
Copyright Statement
© 2022 The Authors. Published by Elsevier Ltd.
This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/).
This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/).
License URL
Publication Status
Published
Article Number
111388
Date Publish Online
2022-11-18