Ammonia sensing using arrays of silicon nanowires and graphene
File(s)
Author(s)
Fobelets, K
Panteli, C
Sydoruk, O
Li, Chuanbo
Type
Journal Article
Abstract
Ammonia (NH3) is a toxic gas released in different industrial, agricultural and natural processes. It is also a biomarker for some diseases. These require NH3 sensors for health and safety reasons. To boost the sensitivity of solid-state sensors, the effective sensing area should be increased. Two methods are explored and compared using an evaporating pool of 0.5 mL NH4OH (28% NH3). In the first method an array of Si nanowires (Si NWA) is obtained via metal-assisted-electrochemical etching to increase the effective surface area. In the second method CVD graphene is suspended on top of the Si nanowires to act as a sensing layer. Both the effective surface area as well as the density of surface traps influences the amplitude of the response. The effective surface area of Si NWAs is 100 × larger than that of suspended graphene for the same top surface area, leading to a larger response in amplitude by a factor of ~7 notwithstanding a higher trap density in suspended graphene. The use of Si NWAs increases the response rate for both Si NWAs as well as the suspended graphene due to more effective NH3 diffusion processes.
Date Issued
2018-06-01
Date Acceptance
2018-06-01
Citation
Journal of Semiconductors, 2018, 39 (6)
ISSN
1674-4926
Publisher
IOP Publishing
Journal / Book Title
Journal of Semiconductors
Volume
39
Issue
6
Copyright Statement
© 2018 Chinese Institute of Electronics. This is an author-created, un-copyedited version of an article accepted for publication in [insert name of journal]. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The definitive publisher authenticated version is available online at https://iopscience.iop.org/article/10.1088/1674-4926/39/6/063001
Identifier
http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000442126400010&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=1ba7043ffcc86c417c072aa74d649202
Subjects
Science & Technology
Physical Sciences
Physics, Condensed Matter
Physics
NH3 sensor
silicon nanowires
resistive sensor
low frequency noise
graphene
GAS SENSORS
METAL-OXIDES
FABRICATION
NOISE
Publication Status
Published
Article Number
ARTN 063001
Date Publish Online
2018-06-01