Evaluation platform for MEMS-actuated 3D-printed compliant structures
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Submitted version
Author(s)
Chen, Xu
Kiziroglou, Michail E
Yeatman, Eric M
Type
Conference Paper
Abstract
This paper presents experimental results on an evaluation platform for MEMS-actuated compliant structures. A combination of 3 dimensional (3D) flexure design, 3D printing of polymers with controlled stiffness is employed. A modular system design approach allows the interchange and combination of different actuation cantilevers, flexures and structure designs implemented as standalone test parts with minimal assembly requirements. The performance evaluation method includes synchronised electrical excitation and optical displacement measurements, allowing characterisation of motion amplification, dynamic response as well as actuating power transfer. As a demonstrator, a single lever compliant structure was designed, fabricated and tested on the platform to investigate how geometry and material stiffness affect performance. The experimental results reveal that significant improvement of amplification ratio and absolute phase lag can be achieved by selecting a flexure height and material composition suitable for a given application. This method of combined experimental evaluation and custom 3D design and printing is promising for optimising the design of compliant structures for MEMS sensors, actuators and energy transducers with amplified or translated motion capability.
Date Issued
2021-12-06
Date Acceptance
2021-12-01
Citation
2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS), 2021, pp.188-191
Publisher
IEEE
Start Page
188
End Page
191
Journal / Book Title
2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)
Copyright Statement
© 2021 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Sponsor
Engineering & Physical Science Research Council (EPSRC)
Identifier
https://ieeexplore.ieee.org/document/9658407
Grant Number
EP/P012779/1
Source
2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)
Publication Status
Published
Start Date
2021-12-06
Finish Date
2021-12-08
Coverage Spatial
Exeter, United Kingdom
Date Publish Online
2021-12-30