High Electron Mobility Thin-Film Transistors Based on Solution-Processed Semiconducting Metal Oxide Heterojunctions and Quasi-Superlattices
File(s)Lin et al. Advance Science 2015.pdf (1.49 MB) Lin_et_al-2015-Advanced_Science.pdf (1.83 MB)
Accepted version
Published version
Author(s)
Type
Journal Article
Abstract
High mobility thin-film transistor technologies that can be implemented using simple and inexpensive fabrication methods are in great demand because of their applicability in a wide range of emerging optoelectronics. Here, a novel concept of thin-film transistors is reported that exploits the enhanced electron transport properties of low-dimensional polycrystalline heterojunctions and quasi-superlattices (QSLs) consisting of alternating layers of In2O3, Ga2O3, and ZnO grown by sequential spin casting of different precursors in air at low temperatures (180–200 °C). Optimized prototype QSL transistors exhibit band-like transport with electron mobilities approximately a tenfold greater (25–45 cm2 V−1 s−1) than single oxide devices (typically 2–5 cm2 V−1 s−1). Based on temperature-dependent electron transport and capacitance-voltage measurements, it is argued that the enhanced performance arises from the presence of quasi 2D electron gas-like systems formed at the carefully engineered oxide heterointerfaces. The QSL transistor concept proposed here can in principle extend to a range of other oxide material systems and deposition methods (sputtering, atomic layer deposition, spray pyrolysis, roll-to-roll, etc.) and can be seen as an extremely promising technology for application in next-generation large area optoelectronics such as ultrahigh definition optical displays and large-area microelectronics where high performance is a key requirement.
Date Issued
2015-05-26
Date Acceptance
2015-04-11
Citation
Advanced Science, 2015, 2 (7)
ISSN
2198-3844
Publisher
Wiley
Journal / Book Title
Advanced Science
Volume
2
Issue
7
Copyright Statement
© 2015 The Authors. This is an open access article under the terms of the Creative Commons Attribution License, which permits use, distribution and reproduction in any medium, provided the original work is properly cited.
License URL
Sponsor
Stichting Dutch Polymer Institute
Commission of the European Communities
Grant Number
DPI/2011-11414
280221
Subjects
Science & Technology
Physical Sciences
Technology
Chemistry, Multidisciplinary
Nanoscience & Nanotechnology
Materials Science, Multidisciplinary
Chemistry
Science & Technology - Other Topics
Materials Science
FIELD-EFFECT TRANSISTORS
LOW-TEMPERATURE
OPTICAL-PROPERTIES
SOL-GEL
PERFORMANCE
CHANNEL
HETEROSTRUCTURES
CRYSTALLINE
FABRICATION
VOLTAGE
Publication Status
Published
Article Number
1500058