Surface tension powered self-assembly of 3-D micro-optomechanical structures
File(s)Surface tension powered self-assembly of 3D.pdf (675.49 KB)
Published version
Author(s)
Syms,R.R.A.
Type
Journal Article
Version
Published version
Date Issued
1999
Citation
IEEE Microelectromechanical Systems, 1999, 4, 8, pp.448-455
ISSN
1057 7157
Start Page
448
End Page
455
Journal / Book Title
IEEE Microelectromechanical Systems
Volume
8
Copyright Statement
© 1999 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.
Source Volume Number
8
Edition
4