Solid phase epitaxial growth of high mobility La:BaSnO3 thin films co-doped with
interstitial hydrogen
interstitial hydrogen
File(s)Neidermeier 2016 APL.pdf (1.83 MB)
Published version
Author(s)
Type
Journal Article
Abstract
This work presents the solid phase epitaxial growth of high mobility La:BaSnO3thin films on SrTiO3 single crystal substrates by crystallization through thermal annealing of nanocrystalline thin films prepared by pulsed laser deposition at room temperature. The La:BaSnO3thin films show high epitaxial quality and Hall mobilities up to 26 ± 1 cm2/Vs. Secondary ion mass spectroscopy is used to determine the La concentration profile in the La:BaSnO3thin films, and a 9%–16% La doping activation efficiency is obtained. An investigation of H doping to BaSnO3thin films is presented employing H plasma treatment at room temperature. Carrier concentrations in previously insulating BaSnO3thin films were increased to 3 × 1019 cm−3 and in La:BaSnO3thin films from 6 × 1019 cm−3 to 1.5 × 1020 cm−3, supporting a theoretical prediction that interstitial H serves as an excellent n-type dopant. An analysis of the free electron absorption by infrared spectroscopy yields a small (H,La):BaSnO3 electron effective mass of 0.27 ± 0.05 m0 and an optical mobility of 26 ± 7 cm2/Vs. As compared to La:BaSnO3 single crystals, the smaller electron mobility in epitaxial thin films grown on SrTiO3 substrates is ascribed to threading dislocations as observed in high resolution transmission electron micrographs.
Date Issued
2016-04-28
Date Acceptance
2016-04-15
Citation
Applied Physics Letters, 2016, 108
ISSN
1077-3118
Publisher
American Institute of Physics (AIP)
Journal / Book Title
Applied Physics Letters
Volume
108
Copyright Statement
© 2016 The American Physical Society
Subjects
Applied Physics
09 Engineering
02 Physical Sciences
Article Number
172101