A high-resolution versatile focused ion implantation platform for nanoscale engineering
Author(s)
Type
Journal Article
Abstract
The ability to spatially control and modify material properties on the nanoscale, including within nanoscale objects themselves, is a fundamental requirement for the development of advanced nanotechnologies. The development of a platform for nanoscale advanced materials engineering (P-NAME) designed to meet this demand is demonstrated. P-NAME delivers a high-resolution focused ion beam system with a coincident scanning electron microscope and secondary electron detection of single-ion implantation events. The isotopic mass-resolution capability of the P-NAME system for a wide range of ion species is demonstrated, offering access to the implantation of isotopes that are vital for nanomaterials engineering and nanofunctionalization. The performance of the isotopic mass selection is independently validated using secondary ion mass spectrometry (SIMS) for a number of species implanted into intrinsic silicon. The SIMS results are shown to be in good agreement with dynamic ion implantation simulations, demonstrating the validity of this simulation approach. The wider performance capabilities of P-NAME, including sub-10 nm ion beam imaging resolution and the ability to perform direct-write ion beam doping and nanoscale ion lithography, are also demonstrated.
Date Issued
2023-11
Date Acceptance
2023-09-13
Citation
Advanced Engineering Materials, 2023, 25 (22)
ISSN
1438-1656
Publisher
Wiley
Journal / Book Title
Advanced Engineering Materials
Volume
25
Issue
22
Copyright Statement
© 2023 The Authors. Advanced Engineering Materials published by Wiley-VCH GmbH
This is an open access article under the terms of the Creative Commons Attribution License, which permits use, distribution and reproduction in any medium, provided the original work is properly cited.
This is an open access article under the terms of the Creative Commons Attribution License, which permits use, distribution and reproduction in any medium, provided the original work is properly cited.
License URL
Identifier
https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:001068937600001&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=a2bf6146997ec60c407a63945d4e92bb
Subjects
BEAM LITHOGRAPHY
DEVICES
focused ion beam
high-resolution isotopic doping
Materials Science
Materials Science, Multidisciplinary
NANOFABRICATION
nanomaterials engineering
nanoscale implantation
nanoscale lithography
Science & Technology
Technology
Publication Status
Published
Article Number
2300889
Date Publish Online
2023-09-24