Silicon micromachined mass filter for a low power, low cost quadrupole mass spectrometer
File(s)Silicon micromachined mass filter.pdf (543.04 KB)
Published version
Author(s)
Tunstall,J.J.
Taylor,S.
Syms,R.R.A.
Tate,T.J.
Ahmad,M.M.
Type
Conference Paper
Version
Published version
Date Issued
1998
Citation
1998
Source Title
IEEE - Micro Electro Mechanical Systems 1998 (MEMS 98) Proceedings: The Eleventh Annual International Workshop – Heidelberg, Germany
Copyright Statement
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Source
IEEE - Micro Electro Mechanical Systems 1998 (MEMS 98) Proceedings: The Eleventh Annual International Workshop – Heidelberg, Germany