Monolithic solder-on nanoporous Si-Cu contacts for stretchable silicone composite sensors
File(s)acsami.9b17076.pdf (1.07 MB)
Accepted version
Author(s)
Type
Journal Article
Abstract
We report a method of creating solderable, mechanically robust, electrical contacts to interface (soft) silicone-based strain sensors with conventional (hard) solid-state electronics using a nanoporous Si-Cu composite. The Si-based solder-on electrical contact consists of a copper-plated nanoporous Si top surface formed through metal-assisted chemical etching and electroplating, and a smooth Si bottom surface which can be covalently bonded onto silicone-based strain sensors through plasma bonding. We investigated the mechanical and electrical properties of the contacts proposed under relevant ranges of mechanical stress for applications in physiological monitoring and rehabilitation. We also produced a series of proof-of-concept devices, including a wearable respiration monitor, leg band for exercise monitoring and Squeeze-ball for monitoring rehabilitation of patients with hand injuries or neurological disorders, to demonstrate the mechanical robustness and versatility of the technology developed, in real-world applications.
Date Issued
2019-12-18
Date Acceptance
2019-11-12
Citation
ACS Applied Materials and Interfaces, 2019, 11 (50), pp.47577-47586
ISSN
1944-8244
Publisher
American Chemical Society
Start Page
47577
End Page
47586
Journal / Book Title
ACS Applied Materials and Interfaces
Volume
11
Issue
50
Copyright Statement
© 2019 American Chemical Society. This document is the Accepted Manuscript version of a Published Work that appeared in final form in ACS Applied Materials and Interfaces, after peer review and technical editing by the publisher. To access the final edited and published work see https://doi.org/10.1021/acsami.9b17076.
Sponsor
Wellcome Trust
Engineering & Physical Science Research Council (EPSRC)
Identifier
https://www.ncbi.nlm.nih.gov/pubmed/31714731
Grant Number
207687/Z/17/Z
EP/R010242/1
Subjects
flexible devices
monolithic integration
soft sensors and electronics
stretchable electronics and sensors
wearable sensors
0904 Chemical Engineering
0303 Macromolecular and Materials Chemistry
0306 Physical Chemistry (incl. Structural)
Nanoscience & Nanotechnology
Publication Status
Published
Coverage Spatial
United States
Date Publish Online
2019-11-12