Miniaturized wet-wet differential pressure sensor
File(s)sensors2022_dpflow_Submitted.pdf (348.08 KB)
Accepted version
Author(s)
Type
Conference Paper
Abstract
We report a miniaturized wet-wet differential pressure sensor with applications in pressure and flow sensing in water networks and other harsh environments. The device is similar in concept to a conventional wet-wet differential pressure sensor in that the sensing element is protected from the external environment by oil-filled cavities closed off by corrugated diaphragms. However, with a package envelope of 11.0 x 4.8 x 3.4 mm 3 , corresponding to a volume of only 0.18 cm 3 , the device is considerably smaller than commercially available wet-wet differential pressure sensors. A high degree of miniaturization has been achieved by using micromachining to fabricate the corrugated diaphragms. Preliminary experimental results are presented showing operation of the device as a delta-pressure flow speed sensor in a water flow test rig.
Date Issued
2022-12-08
Date Acceptance
2022-08-09
Citation
2022 IEEE Sensors, 2022
ISSN
1930-0395
Publisher
IEEE
Journal / Book Title
2022 IEEE Sensors
Identifier
https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000918629700144&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=1ba7043ffcc86c417c072aa74d649202
Source
IEEE Sensors Conference
Subjects
corrugated diaphragm
delta-pressure flow sensor
Engineering
Engineering, Electrical & Electronic
micromachining
Remote Sensing
Science & Technology
Technology
wet-wet pressure sensor
Publication Status
Published
Start Date
2022-10-30
Finish Date
2022-11-02
Coverage Spatial
Dallas, TX, USA