In situ sputtering from the micromanipulator to enable cryogenic preparation of specimens for atom probe tomography by focused-ion beam
File(s)
Published version
Author(s)
Douglas, James O
Conroy, Michele
Giuliani, Finn
Gault, Baptiste
Type
Journal Article
Abstract
Workflows have been developed in the past decade to enable atom probe tomography analysis at cryogenic temperatures. The inability to control the local deposition of the metallic precursor from the gas-injection system (GIS) at cryogenic temperatures makes the preparation of site-specific specimens by using lift-out extremely challenging in the focused-ion beam. Schreiber et al. exploited redeposition to weld the lifted-out sample to a support. Here, we build on their approach to attach the region-of-interest and additionally strengthen the interface with locally sputtered metal from the micromanipulator. Following standard focused-ion beam annular milling, we demonstrate atom probe analysis of Si in both laser pulsing and voltage mode, with comparable analytical performance as a presharpened microtip coupon. Our welding approach is versatile, as various metals could be used for sputtering, and allows similar flexibility as the GIS in principle.
Date Issued
2023-06
Date Acceptance
2023-02-05
Citation
Microscopy and Microanalysis, 2023, 29 (3), pp.1009-1017
ISSN
1083-0375
Publisher
Oxford University Press
Start Page
1009
End Page
1017
Journal / Book Title
Microscopy and Microanalysis
Volume
29
Issue
3
Copyright Statement
© The Author(s) 2023. Published by Oxford University Press on behalf of the Microscopy Society of America.
This is an Open Access article distributed under the terms of the Creative Commons Attribution License (https://creativecommons.org/licenses/by/4.0/), which permits unrestricted reuse, distribution, and reproduction in any medium, provided the original work is properly cited.
This is an Open Access article distributed under the terms of the Creative Commons Attribution License (https://creativecommons.org/licenses/by/4.0/), which permits unrestricted reuse, distribution, and reproduction in any medium, provided the original work is properly cited.
License URL
Identifier
https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000962162900001&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=a2bf6146997ec60c407a63945d4e92bb
Subjects
atom probe tomography
cryogenic preparation
DEPOSITION
DIFFRACTION
ELECTRON-MICROSCOPY
focused-ion beam
FROZEN
FUTURE
in situ sputtering
INTERFACES
Materials Science
Materials Science, Multidisciplinary
Microscopy
REDEPOSITION
Science & Technology
Technology
TEM
WATER
Publication Status
Published
Date Publish Online
2023-04-04