Investigation of the Switching Mechanism in TiO2-Based RRAM: A Two-Dimensional EDX Approach
File(s)acsami%2E6b04919.pdf (6.65 MB)
Published version
Author(s)
Type
Journal Article
Abstract
The next generation of nonvolatile memory storage may well be based on resistive switching in metal oxides. TiO2 as transition metal oxide has been widely used as active layer for the fabrication of a variety of multistate memory nanostructure devices. However, progress in their technological development has been inhibited by the lack of a thorough understanding of the underlying switching mechanisms. Here, we employed high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) combined with two-dimensional energy dispersive X-ray spectroscopy (2D EDX) to provide a novel, nanoscale view of the mechanisms involved. Our results suggest that the switching mechanism involves redistribution of both Ti and O ions within the active layer combined with an overall loss of oxygen that effectively render conductive filaments. Our study shows evidence of titanium movement in a 10 nm TiO2 thin-film through direct EDX mapping that provides a viable starting point for the improvement of the robustness and lifetime of TiO2-based resistive random access memory (RRAM).
Date Issued
2016-07-13
Date Acceptance
2016-07-13
Citation
ACS Applied Materials & Interfaces, 2016, 8 (30), pp.19605-19611
ISSN
1944-8244
Publisher
American Chemical Society
Start Page
19605
End Page
19611
Journal / Book Title
ACS Applied Materials & Interfaces
Volume
8
Issue
30
Copyright Statement
This is an open access article published under a Creative Commons Attribution (CC-BY)
License, which permits unrestricted use, distribution and reproduction in any medium,
provided the author and source are cited.
License, which permits unrestricted use, distribution and reproduction in any medium,
provided the author and source are cited.
License URL
Subjects
Science & Technology
Technology
Nanoscience & Nanotechnology
Materials Science, Multidisciplinary
Science & Technology - Other Topics
Materials Science
resistive memory
titanium dioxide
memristors
energy dispersive X-ray spectroscopy
thin films
resistive switching
RESISTIVE SWITCHES
SOLID-ELECTROLYTE
MEMORY
RERAM
TEMPERATURE
IMPROVEMENT
DIFFUSION
TITANIUM
DEVICE
RUTILE
0904 Chemical Engineering
0303 Macromolecular And Materials Chemistry
0306 Physical Chemistry (Incl. Structural)
Publication Status
Published