Deposition of nanocrystalline multilayer graphene using pulsed laser deposition
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Published version
Author(s)
Wang, Yuxuan
Zou, Bin
Rente, Bruno
Alford, Neil
Petrov, Peter K
Type
Journal Article
Abstract
The wide application of graphene in the industry requires the direct growth of graphene films on silicon substrates. In this study, we found a possible technique to meet the requirement above. Multilayer graphene thin films (MLG) were grown without a catalyst on Si/SiO2 using pulsed laser deposition (PLD). It was found that the minimum number of laser pulses required to produce fully covered (uninterrupted) samples is 500. This number of laser pulses resulted in samples that contain ~5 layers of graphene. The number of layers was not affected by the laser fluence and the sample cooling rate after the deposition. However, the increase in the laser fluence from 0.9 J/cm2 to 1.5 J/cm2 resulted in a 2.5-fold reduction in the MLG resistance. The present study reveals that the PLD method is suitable to produce nanocrystalline multilayer graphene with electrical conductivity of the same magnitude as commercial CVD graphene samples.
Date Acceptance
2023-05-24
Citation
Crystals, 13 (6), pp.1-8
ISSN
2073-4352
Publisher
MDPI AG
Start Page
1
End Page
8
Journal / Book Title
Crystals
Volume
13
Issue
6
Copyright Statement
Copyright: © 2023 by the authors.
Licensee MDPI, Basel, Switzerland.
This article is an open access article
distributed under the terms and
conditions of the Creative Commons
Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/)
Licensee MDPI, Basel, Switzerland.
This article is an open access article
distributed under the terms and
conditions of the Creative Commons
Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/)
License URL
Identifier
http://dx.doi.org/10.3390/cryst13060881
Publication Status
Published
Date Publish Online
2023-05-27