Mechanical synchronization of MEMS electrostatically driven coupled beam filters
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Published version
Author(s)
Syms, Richard
Bouchaala, Adam
Type
Journal Article
Abstract
Micro-electromechanical systems (MEMS) bandpass filters based on arrays of electrostatically driven coupled beams have been demonstrated at MHz frequencies. High performance follows from the high Q-factor of mechanical resonators, and electrostatic transduction allows tuning, matching and actuation. For high-order filters, there is a conflict between the transduction mechanism and the coupling arrangement needed for dynamic synchronization: it is not possible to achieve synchronization and tuning simultaneously using a single voltage. Here we propose a general solution, based on the addition of mass-loaded beams at the ends of the array. These beams deflect for direct current (DC) voltages, and therefore allow electrostatic tuning, but do not respond to in-band alternating current (AC) voltages and hence do not interfere with synchronization. Spurious modes generated by these beams may be damped, leaving a good approximation to the desired response. The approach is introduced using a lumped element model and verified using stiffness matrix and finite element models for in-plane arrays with parallel plate drives and shown to be tolerant of the exact mass value. The principle may allow compensation of fabrication-induced variations in complex filters.
Date Issued
2021-10-01
Date Acceptance
2021-09-25
Citation
Micromachines, 2021, 12 (10), pp.1-12
ISSN
2072-666X
Publisher
MDPI AG
Start Page
1
End Page
12
Journal / Book Title
Micromachines
Volume
12
Issue
10
Copyright Statement
Copyright: © 2021 by the authors.
Licensee MDPI, Basel, Switzerland.
This article is an open access article
distributed under the terms and
conditions of the Creative Commons
Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
Licensee MDPI, Basel, Switzerland.
This article is an open access article
distributed under the terms and
conditions of the Creative Commons
Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
License URL
Identifier
https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000713298700001&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=a2bf6146997ec60c407a63945d4e92bb
Subjects
Science & Technology
Physical Sciences
Technology
Chemistry, Analytical
Nanoscience & Nanotechnology
Instruments & Instrumentation
Physics, Applied
Chemistry
Science & Technology - Other Topics
Physics
mechanical filter
coupled resonator
MEMS
BANDPASS-FILTERS
RESONATORS
BANDWIDTH
ARRAY
Publication Status
Published
Article Number
ARTN 1191
Date Publish Online
2021-09-30