Low dielectric filling factor millimeter-wave photonic crystal resonator micromachined from NTD high resistivity silicon
File(s)IEEE Authors Version TMTT3396631.pdf (1.38 MB)
Accepted version
Author(s)
Type
Journal Article
Abstract
This article introduces a millimeter-wave electromagnetic (EM) bandgap (EBG) resonator, commonly referred to as a photonic crystal (PC) resonator (PCR), designed for use in a 45-GHz ultralow phase noise MMIC oscillator. The novel 2-D slab PCR design utilizes a higher order resonant mode, which has been engineered to have a reduced dielectric filling factor (FF) of 47%. These improvements demonstrate a factor of two improvement in unloaded Q -factor (122 000 at 297 K) and halving of the resonant frequency temperature sensitivity (21 ppm/K) compared to a conventional L5 PCR design. The PCR is fabricated using bulk micromachining of high-resistivity silicon (HRS), which has been neutron transmutation doped (NTD) leading to an additional factor of two improvement in quality ( Q -) factor over previous works featuring nonirradiated HRS. Additionally, it is shown that unloaded Q -factors in excess of 200 000 are achievable when the temperature is reduced to below 274 K. The PCR benefits from a planar geometry, integrated waveguides, and fabrication using a mature silicon micromachining process.
Editor(s)
Hanham, Stephen
Date Issued
2024-11-01
Date Acceptance
2024-04-24
Citation
IEEE Transactions on Microwave Theory and Techniques, 2024, 72 (11), pp.6601-6612
ISSN
0018-9480
Publisher
Institute of Electrical and Electronics Engineers
Start Page
6601
End Page
6612
Journal / Book Title
IEEE Transactions on Microwave Theory and Techniques
Volume
72
Issue
11
Copyright Statement
Copyright © 2024, IEEE. This is the author’s accepted manuscript made available under a CC-BY licence in accordance with Imperial’s Research Publications Open Access policy (www.imperial.ac.uk/oa-policy)
License URL
Publication Status
Published
Date Publish Online
2024-05-14