Off-The-Shelf MEMS for Rotary MEMS
File(s)MEMS paper Hanrahan Final.pdf (521.43 KB)
Accepted version
Author(s)
Type
Conference Paper
Date Issued
2012-01-29
Citation
2012
ISBN
9781467303248
ISSN
1084-6999
Publisher
IEEE
Copyright Statement
© 2012 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Description
02.08.12 MEB. Accepted version, publisher allows this to be added. IEEE policy
Source
IEEE MEMS
Source Place
Paris
Publication Status
Accepted
Start Date
2012-01-29
Finish Date
2012-02-02
Coverage Spatial
Paris