The effect of exposure temperature and time on the diffusion rate of rare-earth oxides applied on silicon carbide fiber-reinforced SiC ceramic matrix composites (SiC/SiC CMCs) have been investigated. Knowledge on diffusion mechanism between the deposited rare-earth (RE) slurry and silica layer is necessary to understand the process governing EBCs formation and their properties. SEM/EDS analysis were used to study the effect of microstructure on diffusivity. The diffusion coefficient increases with increasing sintering temperature and time. The measured diffusion coefficients of the RE-coating into silica layer were in the order of 10−15-10-17 m2/s revealing an overall good adhesion on the SiC/SiC CMCs.