Resistive graphene humidity sensors with rapid and direct electrical readout.
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Author(s)
Type
Journal Article
Abstract
We demonstrate humidity sensing using a change of the electrical resistance of single-layer chemical vapor deposited (CVD) graphene that is placed on top of a SiO2 layer on a Si wafer. To investigate the selectivity of the sensor towards the most common constituents in air, its signal response was characterized individually for water vapor (H2O), nitrogen (N2), oxygen (O2), and argon (Ar). In order to assess the humidity sensing effect for a range from 1% relative humidity (RH) to 96% RH, the devices were characterized both in a vacuum chamber and in a humidity chamber at atmospheric pressure. The measured response and recovery times of the graphene humidity sensors are on the order of several hundred milliseconds. Density functional theory simulations are employed to further investigate the sensitivity of the graphene devices towards water vapor. The interaction between the electrostatic dipole moment of the water and the impurity bands in the SiO2 substrate leads to electrostatic doping of the graphene layer. The proposed graphene sensor provides rapid response direct electrical readout and is compatible with back end of the line (BEOL) integration on top of CMOS-based integrated circuits.
Date Issued
2015-11-02
Date Acceptance
2015-10-17
Citation
Nanoscale, 2015, 7, pp.19099-19109
ISSN
2040-3372
Publisher
Royal Society of Chemistry
Start Page
19099
End Page
19109
Journal / Book Title
Nanoscale
Volume
7
Copyright Statement
This journal is © The Royal Society of Chemistry 2015. This article is licensed under a Creative Commons Attribution-NonCommercial 3.0 Unported Licence.
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Publication Status
Published