Pyroelectric response of lead zirconate titanate thin films on silicon: Effect of thermal stresses
File(s)PZT Pyro 082713 Final Plus Figs.pdf (1.16 MB)
Accepted version
Author(s)
Type
Journal Article
Abstract
Ferroelectric lead zirconate titanate [Pb(ZrxTi1-xO)3, (PZT x:1-x)] has received considerable interest for applications related to uncooled infrared devices due to its large pyroelectric figures of merit near room temperature, and the fact that such devices are inherently ac coupled, allowing for simplified image post processing. For ferroelectric films made by industry-standard deposition techniques, stresses develop in the PZT layer upon cooling from the processing/growth temperature due to thermal mismatch between the film and the substrate. In this study, we use a non-linear thermodynamic model to investigate the pyroelectric properties of polycrystalline PZT thin films for five different compositions (PZT 40:60, PZT 30:70, PZT 20:80, PZT 10:90, PZT 0:100) on silicon as a function of processing temperature (25–800 °C). It is shown that the in-plane thermal stresses in PZT thin films alter the out-of-plane polarization and the ferroelectric phase transformation temperature, with profound effect on the pyroelectric properties. PZT 30:70 is found to have the largest pyroelectric coefficient (0.042 μC cm−2 °C−1, comparable to bulk values) at a growth temperature of 550 °C; typical to what is currently used for many deposition processes. Our results indicate that it is possible to optimize the pyroelectric response of PZT thin films by adjusting the Ti composition and the processing temperature, thereby, enabling the tailoring of material properties for optimization relative to a specific deposition process.
Date Issued
2013-11-25
Date Acceptance
2013-11-01
Citation
JOURNAL OF APPLIED PHYSICS, 2013, 114 (20)
ISSN
0021-8979
Publisher
AIP Publishing
Journal / Book Title
JOURNAL OF APPLIED PHYSICS
Volume
114
Issue
20
Copyright Statement
© 2013 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Journal of Applied Physics 114, 204101 (2013) and may be found at https://dx.doi.org/10.1063/1.4833555
Identifier
http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000327697600029&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=1ba7043ffcc86c417c072aa74d649202
Subjects
Science & Technology
Physical Sciences
Physics, Applied
Physics
PHYSICS, APPLIED
SOLID-SOLUTION SYSTEM
DIELECTRIC-PROPERTIES
THERMODYNAMIC THEORY
FERROELECTRIC-FILMS
RESIDUAL-STRESS
PZT
TEMPERATURE
DETECTOR
DEVICES
SENSORS
Applied Physics
01 Mathematical Sciences
02 Physical Sciences
09 Engineering
Publication Status
Published
Article Number
ARTN 204101