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The role of electrons in sputter deposition in thin films
File(s)
Author(s)
Green, F. A.
Type
Thesis
Version
Open Access
Date Issued
1979
Date Awarded
1979
URI
Copyright Statement
Attribution NoDerivatives 4.0 International Licence (CC BY-ND)
License URL
Creator
Green, F. A.
Publisher Department
Department of Electrical Engineering
Publisher Institution
Imperial College London
Qualification Level
Doctoral
Qualification Name
Doctor of Philosophy (PhD)
Author Permission
Not granted