A micromachined angular-acceleration sensor for geophysical applications
File(s)APLPikeLiu2016.pdf (1.36 MB)
Published version
Author(s)
Liu, H
Pike, WT
Type
Journal Article
Abstract
This paper presents an angular-acceleration sensor that works as either an angular accelerometer or a gravity gradiometer and is based on the micro electromechanical system (MEMS) technology. The changes in the angle of the sensor mass are sensed by a rotational capacitive array transducer that is formed by electrodes on both the stator and rotor dies of the flip-chip-bonded MEMS chip (21 mm × 12.5 mm × 1 mm). The prototype was characterized, demonstrating a fundamental frequency of 27 Hz, a quality factor of 230 in air, and a sensitivity of 6 mV/(rad/s2). The demonstrated noise floor was less than 0.003 rad/s2/Hz−−−√Hz within a bandwidth of 0.1 Hz to 10 Hz, which is comparable with the conventional angular accelerometer and is better than the other reported MEMS sensors in low-frequency ranges. The features of small size and low cost suggest that this MEMS angular-acceleration sensor could be mounted on a drone, a satellite or even a Mars rover, and it is promising to be used for monitoring angular accelerations, aiding seismic recording, mapping gravity anomalies, and other geophysical applications for large-scale terrestrial and space deployments.
Date Issued
2016-10-26
Date Acceptance
2016-10-16
Citation
Applied Physics Letters, 2016, 109 (17)
ISSN
1077-3118
Publisher
AIP Publishing
Journal / Book Title
Applied Physics Letters
Volume
109
Issue
17
Copyright Statement
© 2016 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Applied Physics Letters 109, 173506 (2016); doi: 10.1063/1.4966547
and may be found at https://dx.doi.org/10.1063/1.4966547
and may be found at https://dx.doi.org/10.1063/1.4966547
Sponsor
Science and Technology Facilities Council (STFC)
Identifier
http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000387258300044&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=1ba7043ffcc86c417c072aa74d649202
Grant Number
ST/L001098/1
Subjects
Science & Technology
Physical Sciences
Physics, Applied
Physics
Applied Physics
09 Engineering
02 Physical Sciences
Publication Status
Published
Article Number
ARTN 173506