MEMS electrostatic micropower generator for low frequency operation
File(s)
Author(s)
Type
Journal Article
Abstract
This paper describes the analysis, simulation and testing of a microengineered motion-driven power generator, suitable for application in sensors within or worn on the human body. Micro-generators capable of powering sensors have previously been reported, but these have required high frequency mechanical vibrations to excite a resonant structure. However, body-driven movements are slow and irregular, with large displacements, and hence do not effectively couple energy into such generators. The device presented here uses an alternative, non-resonant operating mode. Analysis of this generator shows its potential for the application considered, and shows the possibility to optimise the design for particular conditions. An experimental prototype based on a variable parallel-plate capacitor operating in constant charge mode is described which confirms the analysis and simulation models. This prototype, when precharged to 30 V, develops an output voltage of 250 V, corresponding to 0.3 μJ per cycle. The experimental test procedure and the instrumentation are also described.
Version
Accepted version
Date Issued
2004
Citation
Sensors and Actuators A: Physical, 2004, Volume 115 (2-3), pp.523-529
ISSN
0924-4247
Publisher
Elsevier
Start Page
523
End Page
529
Journal / Book Title
Sensors and Actuators A: Physical
Volume
Volume 115
Issue
2-3
Copyright Statement
© 2004 Elsevier B.V. This is the author's version of a work that was accepted for publication in Sensors and Actuators A: Physical. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Sensors and Actuators A: Physical, volume 115, issue 2-3 (September 2004). doi:10.1016/j.sna.2004.04.026
Source Volume Number
Volume 115