Novel patterning of flexible and transparent Ag nanowire electrodes using oxygen plasma treatment
File(s)Manuscript_JMCC_accepted.docx (26.48 MB)
Accepted version
Author(s)
Type
Journal Article
Abstract
We report a novel patterning method using oxygen plasma treatment for flexible and transparent Ag nanowire electrodes. Using a dry film photoresist as a solid-state film-type photoresist, Ag nanowires were selectively oxidized under oxygen plasma treatment. Microstructural analysis revealed that the Ag nanowires were fully oxidized after 30 s of oxygen plasma treatment, which was also reflected in the changes in the optoelectronic properties of the Ag nanowires. The fully oxidized Ag nanowires could be completely dissolved in NH3 solution (aq.), without using a toxic etchant to form sharp patterns of Ag nanowire electrodes. To further confirm the applicability of the patterning technique demonstrated here in electronic devices, MoS2 thin-film transistors (TFTs) with patterned Ag-nanowire source/drain (S/D) electrodes were fabricated and they showed similar performances to typical MoS2 TFTs with thin-film-type Ti/Au S/D electrodes.
Date Issued
2018-09-21
Date Acceptance
2018-08-03
Citation
Journal of Materials Chemistry C, 2018, 6 (35), pp.9394-9398
ISSN
2050-7526
Publisher
Royal Society of Chemistry
Start Page
9394
End Page
9398
Journal / Book Title
Journal of Materials Chemistry C
Volume
6
Issue
35
Copyright Statement
© 2018 The Royal Society of Chemistry
Subjects
Science & Technology
Technology
Physical Sciences
Materials Science, Multidisciplinary
Physics, Applied
Materials Science
Physics
LIGHT-EMITTING-DIODES
SILVER-NANOWIRE
METAL-ELECTRODE
FILM
NETWORKS
FABRICATION
CONDUCTORS
Publication Status
Published
Date Publish Online
2018-08-21