Optical imaging and image analysis for high aspect ratio NEMS
File(s)
Accepted version
Author(s)
Syms, RRA
Bouchaala, A
Sydoruk, O
Liu, D
Type
Journal Article
Abstract
A strategy for optical microscopy of high-aspect-ratio (HAR) nanoelectromechanical systems (NEMS) that combine large feature spacing and large height with sub-wavelength width is presented. Line images are simulated using a 2D model of incoherent imaging based on modal diffraction theory. Beyond a sufficient depth, it is shown that sub-wavelength features appear as dark lines, while wider features are visible as their edges. The results suggest NEMS and MEMS may be separated from background in images by detection of valleys in brightness. Results are confirmed by imaging of Si NEMS containing 100 nm wide features in a bright-field microscope. Algorithms for separation of NEMS, MEMS and background in microscope images based on valley detection, thresholding and masking are demonstrated.
Date Issued
2018-11-20
Date Acceptance
2018-10-30
Citation
Journal of Micromechanics and Microengineering, 2018, 29 (1)
ISSN
0960-1317
Publisher
IOP Publishing
Journal / Book Title
Journal of Micromechanics and Microengineering
Volume
29
Issue
1
Copyright Statement
© 2018 IOP Publishing Ltd. This is an author-created, un-copyedited version of an article accepted for publication in Journal of Micromechanics and Microengineering. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The definitive publisher authenticated version is available online at https://dx.doi.org/10.1088/1361-6439/aaecce.
Identifier
http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000450910400001&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=1ba7043ffcc86c417c072aa74d649202
Subjects
Science & Technology
Technology
Physical Sciences
Engineering, Electrical & Electronic
Nanoscience & Nanotechnology
Instruments & Instrumentation
Physics, Applied
Engineering
Science & Technology - Other Topics
Physics
NEMS
MEMS
sub-wavelength imaging
image segmentation
COUPLED-WAVE ANALYSIS
THRESHOLDING TECHNIQUES
GRATING DIFFRACTION
EDGE-DETECTION
THICK LAYERS
SILICON
ALGORITHMS
EXTRACTION
Publication Status
Published
Article Number
015003