Dear Spiral user, We’re pleased to introduce Helix, https://helix.imperial.ac.uk/ Imperial’s new repository for research datasets. Please use Helix for all future dataset deposits. There is no change to Spiral - continue depositing as usual. For queries, contact the Research Data Management team at rdm-enquiries@imperial.ac.uk. Kind regards, the Spiral Team. The Spiral team
Metallic multilayers for X-band Bragg reflector applications
File(s)
1506.07702v1.pdf (1.23 MB)
Accepted version
Author(s)
Mihai, AP
Adabi, M
Liu, W
Hill, H
Klein, N
Type
Working Paper
Abstract
We present a structural and high frequency (8.72GHz) electrical characterization of sputter deposited Ti/W, Ti/Ru and Mo/Ti metallic multilayers for potential application as acoustic Bragg reflectors. We prove that all metallic multilayers comprised of different acoustic impedance metals such as Ti, W, Mo are promising candidates for Bragg reflector/bottom electrode in full X-band thin film acoustic resonators. Values for high frequency resistivity of the order of $10^{-8} ohm.m$ are measured by use of a contact-free/non-invasive sheet resistance method.
URI
Copyright Statement
© 2015 The Authors
Identifier
http://arxiv.org/abs/1506.07702v1
Subjects
cond-mat.mtrl-sci