Selective normal mode excitation in multilayer thin film bulk acoustic wave resonators
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Published version
Author(s)
Kozyrev, A
Mikhailov, A
Ptashnik, S
Petrov, PK
Alford, N
Type
Journal Article
Abstract
A method for selective normal mode excitation in thin film bulk acoustic wave resonators, based on multilayer structures with any number of ferroelectric films in the paraelectric phase, is presented. The possibility to control the excitation of thin film bulk acoustic resonators' normal modes by simultaneous manipulating both the polarities and the magnitudes of the dc bias voltages applied to the ferroelectric layers is demonstrated. The proposed method was verified using the Lakin's model, modified to describe the electro-mechanical behavior of a structure with four active ferroelectric layers.
Date Issued
2014-10-23
Date Acceptance
2014-10-10
Citation
Applied Physics Letters, 2014, 105 (16)
ISSN
1077-3118
Publisher
AIP Publishing
Journal / Book Title
Applied Physics Letters
Volume
105
Issue
16
Copyright Statement
© 2014 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License.
License URL
Subjects
Science & Technology
Physical Sciences
Physics, Applied
Physics
Applied Physics
09 Engineering
02 Physical Sciences
Publication Status
Published
Article Number
162910