Excimer laser ablation of microstructures: A numerical model
File(s) Excimer laser ablation of.pdf (739.54 KB)
Published version
Author(s)
Paterson, C
Holmes, AS
Smith, RW
Type
Journal Article
Version
Published version
Date Issued
1999-12-01
Citation
J APPL PHYS Vol.( 86 ) No.( 11 ) pp 6538 - 6546
ISSN
0021-8979
Start Page
6538
End Page
6546
Copyright Statement
© American Institute of Physics
Source Volume Number
86
