Exploiting CMOS Technology to Enhance the Performance of ISFET Sensors
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Published version
Author(s)
Prodromakis, T
Liu, Y
Constandinou, TG
Georgiou, P
Toumazou, C
Type
Journal Article
Abstract
This paper presents a novel method for fabricating ISFET devices in unmodified CMOS technologies. Conventional CMOS ISFETs utilise the protective passivation coating as the sensing membrane, with the sensed potential being coupled down to the floating MOS gate via a stack of conducting and insulating layers. The proposed structure minimises the use of these layers by exploiting the passivation opening mask, normally intended for bondpad openings. Parasitic effects such as reduced transconductance and trapped charge within the floating gate structure are minimised, resulting in a lower VT and improved chemical transconductance efficiency. Other characteristics including chemical sensitivity, reference leakage current and noise power are at comparable levels with conventional CMOS-based ISFET devices.
Version
Published version
Date Issued
2010-07-19
Citation
IEEE Electron Device Letters, 2010, 31 (9), pp.1053-1055
ISSN
0741-3106
Publisher
IEEE
Start Page
1053
End Page
1055
Journal / Book Title
IEEE Electron Device Letters
Volume
31
Issue
9
Copyright Statement
© 2010 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Source Volume Number
31
Subjects
ISFET
CMOS
passivation-opening
Publication Status
Published