Dynamic response modelling of MEMS micromirror corner cube reflectors with angular vertical combdrives
File(s)Dynamic response modeling of MEMS.pdf (501.36 KB)
Published version
Author(s)
Hong, Y K
Syms, R R A
Type
Journal Article
Version
Published version
Date Issued
2007-02
Citation
IEEE J. Lightwave Tech., 2007, 25 (2), pp.472-480
ISSN
0733-8724
Start Page
472
End Page
480
Journal / Book Title
IEEE J. Lightwave Tech.
Volume
25
Issue
2
Copyright Statement
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Source Volume Number
25