Temperature stability of thin film refractory plasmonic materials
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Published version
Author(s)
Type
Journal Article
Abstract
Materials such as W, TiN, and SrRuO3 (SRO) have been suggested as promising alternatives to Au and Ag in plasmonic applications owing to their stability at high operational temperatures. However, investigation of the reproducibility of the optical properties after thermal cycling between room and elevated temperatures is so far lacking. Here, thin films of W, Mo, Ti, TiN, TiON, Ag, Au, SrRuO3 and SrNbO3 are investigated to assess their viability for robust refractory plasmonic applications. These results are further compared to the performance of SrMoO3 reported in literature. Films ranging in thickness from 50 to 105 nm are deposited on MgO, SrTiO3 and Si substrates by e-beam evaporation, RF magnetron sputtering and pulsed laser deposition, prior to characterisation by means of AFM, XRD, spectroscopic ellipsometry, and DC resistivity. Measurements are conducted before and after annealing in air at temperatures ranging from 300 to 1000° C for one hour, to establish the maximum cycling temperature and potential longevity at elevated temperatures for each material. It is found that SrRuO3 retains metallic behaviour after annealing at 800° C, while SrNbO3 undergoes a phase transition resulting in a loss of metallic behaviour after annealing at 400° C. Importantly, the optical properties of TiN and TiON are degraded as a result of oxidation and show a loss of metallic behaviour after annealing at 500° C, while the same is not observed in Au until annealing at 600° C. Nevertheless, both TiN and TiON may be better suited than Au or SRO for high temperature applications operating under vacuum conditions.
Date Issued
2018-06-11
Date Acceptance
2018-05-07
Citation
Optics Express, 2018, 12 (12), pp.15726-15744
ISSN
1094-4087
Publisher
Optical Society of America (OSA)
Start Page
15726
End Page
15744
Journal / Book Title
Optics Express
Volume
12
Issue
12
Copyright Statement
© 2018 The Author(s). Published by The Optical Society under the terms of the Creative Commons Attribution 4.0 License. Further distribution of this work must maintain attribution to the author(s) and the published article's title, journal citation, and DOI.
Sponsor
Engineering & Physical Science Research Council (E
Engineering & Physical Science Research Council (EPSRC)
Engineering & Physical Science Research Council (EPSRC)
Grant Number
EP/M013812/1
EP/G060940/1
EP/K503381/1
Subjects
Science & Technology
Physical Sciences
Optics
EPSILON-NEAR-ZERO
OPTICAL-PROPERTIES
TITANIUM-NITRIDE
ENERGY-CONVERSION
SILVER
FE
TI
METALS
NI
AL
0205 Optical Physics
1005 Communications Technologies
0906 Electrical and Electronic Engineering
Optics
Publication Status
Published